APT Development Engineers started working in 1999 with a goal to develop efficient
planar magnetron cathodes for the thin film industry. We focused on flexibility of application and improving target utilization
. The DHRUVA PMSS Series Planar Magnetron Sputtering Sources series were announced in February 2000. Our cathodes
allow the user to configure the sputtering source so that it is optimized for specific materials, process requirements and system
installation. We have created unique cathode designs based on shaping the magnetic field lines to control the erosion track.
The magnet pack design gives better target utilization (> 50 %) and uniform coatings (< 5% 3-sigma).
