SEM Sputter Coater(Fully automated) Sputter Coating System

Products:

Rainbow

SEM SPUTTER COATER Bench Top, Low Cost SEM Sputter Coating System Process Capability System Specification Design Capabilities In March 2000 APT introduced a compact, fully automated desktop SEM Sputter Coater with Fast cycle times and extremely low cost. The clamped target cathode design allows quick change of targets and allows a wide range of target metals to be used. The SEM coater allows user control of sputter power, time and pressure. Process Capability Repeatable control of coating thickness Fully Automatic (One push button Operation - Microprocessor based; safety interlocked) LED Display for Pressure, Time and Power Holds upto 6 SEM stubs High Efficiency DHRUVA Planar Magnetron Cathode

	System Specifications Process Chamber 5" dia. x ht. 5" Glass Chamber
Vacuum High-speed direct-drive two-stage rotarypump (mounted on an antivibration table) Footprint Combining Sputter control Unit and Pumping System(18" x 26" ) Controls Automatic - Microprocessor controlled Target High Efficiency "DHRUVA" Planar Magnetron Cathode 2.5" dia. Cycle Time 10 minutes (for normal SEM metallizer application) Sample Table Holds 6 SEM stubs