SEMICONDUCTOR & OPTICAL Coatings Group - High Vacuum and plasma processing, Multi Layer Sputter Deposition System, Large Substrate Sputter Deposition System, Magnetron Sputter System, Plasma Enhanced CVD System, Reactive Ion Etch System, SEM SPUTTER COATER, Planar Magnetron Sputtering Sources

Products:

Rainbow

	SEMICONDUCTOR & OPTICAL Coatings Group APT's Semiconductor and Optical Coatings Equipment group offers different types of sputter deposition systems, such as an SEM sputter coater, multi-layer/multi target systems and large substrate sputter equipment as well as various types of planer magnetron sputtering sources. Products:
	RAINBOW: Multi Layer Sputter Deposition System BHASKAR: Large Substrate Sputter Deposition System MINI RESEARCH SERIES (MRS) (3" Substrate): SWATI- RF/DC/Magnetron Sputter System CHITRA- Plasma Enhanced CVD System ROHINI- Reactive Ion Etch System SEM SPUTTER COATER (Fully automated): Low Cost bench top System DHRUVA (Planar Magnetron Sputtering Sources): Round ( 2" dia. to 18" dia.) and Rectangular shapes